发明名称 MANUFACTURE OF NEAR-FIELD OPTICAL PROBE AND ITS STRUCTURE
摘要 PROBLEM TO BE SOLVED: To increase the taper angle of the tip of a core and to increase the light transmission efficiency by etching the tip of an optical fiber using the meniscus of an etching liquid and then dipping it into the etching liquid for etching. SOLUTION: First, an optical fiber 1 is lowered, its end face is matched with an interface 6 between an etching liquid 4 and an organic solvent 5, and a meniscus is formed at the tip. While the meniscus is maintained by pulling for small distance, the tip is etched. Then, the optical fiber is lowered, and the tip is dipped into the etching liquid 4 for etching. Finally, the optical fiber 1 is taken out of the etching liquid 4, is washed by water and alcohol successively, and then a metal covering layer is formed, and a small opening is formed at the tip, thus setting the taper angle of the first conical part of the tip to a second-stage taper shape that is larger than the taper angle of a second conical part adjacent to the side of a base edge without changing the concentration of GeO2 to be added to a core 2.
申请公布号 JP2000266655(A) 申请公布日期 2000.09.29
申请号 JP19990073722 申请日期 1999.03.18
申请人 MITSUBISHI ELECTRIC CORP 发明人 NISHIKAWA TOMOSHI
分类号 G02B6/02;G01N37/00;G01Q60/22;G02B6/10;(IPC1-7):G01N13/14 主分类号 G02B6/02
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