发明名称 X-RAY IMAGING DEVICE AND METHOD FOR MAKING SAME
摘要 The invention concerns an X-ray imaging device comprising at least a detecting matrix made of semiconductor material, including pixels (11), to convert the incident X-ray photons into electrical charges, and a silicon-based panel (10) for reading the electrical charges, comprising a plurality of electronic devices, each electronic device being incorporated at a pixel (11), wherein each detecting matrix is provided by a semiconductor material layer vapour-phase deposited on the panel for reading electrical charges. The invention also concerns a method for making such an imaging device.
申请公布号 WO0057205(A1) 申请公布日期 2000.09.28
申请号 WO2000FR00685 申请日期 2000.03.20
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;VERGER, LOICK;PEYRET, OLIVIER;ARQUES, MARC;WOLNY, MICHEL 发明人 VERGER, LOICK;PEYRET, OLIVIER;ARQUES, MARC;WOLNY, MICHEL
分类号 H01L27/146;(IPC1-7):G01T1/24 主分类号 H01L27/146
代理机构 代理人
主权项
地址