发明名称 |
X-RAY IMAGING DEVICE AND METHOD FOR MAKING SAME |
摘要 |
The invention concerns an X-ray imaging device comprising at least a detecting matrix made of semiconductor material, including pixels (11), to convert the incident X-ray photons into electrical charges, and a silicon-based panel (10) for reading the electrical charges, comprising a plurality of electronic devices, each electronic device being incorporated at a pixel (11), wherein each detecting matrix is provided by a semiconductor material layer vapour-phase deposited on the panel for reading electrical charges. The invention also concerns a method for making such an imaging device.
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申请公布号 |
WO0057205(A1) |
申请公布日期 |
2000.09.28 |
申请号 |
WO2000FR00685 |
申请日期 |
2000.03.20 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE;VERGER, LOICK;PEYRET, OLIVIER;ARQUES, MARC;WOLNY, MICHEL |
发明人 |
VERGER, LOICK;PEYRET, OLIVIER;ARQUES, MARC;WOLNY, MICHEL |
分类号 |
H01L27/146;(IPC1-7):G01T1/24 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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