NICKEL, CHROMIUM, IRON ALLOY TYPE SUSCEPTOR STRUCTURE

摘要

A susceptor (30) includes a substrate (12) and a metal layer (14) coupled to the substrate. An adhesive layer (34) is coupled to the metal layer (32) and a support layer (16) is coupled to the adhesive layer (34) for supporting the susceptor structure. The metal layer (32) includes nickel, chromium and iron each comprising a percentage of the metal layer (32) approximately within the following ranges: nickel is 60 % to 68 %; chromium is 5 % to 37 %; and iron is 3 % to 38 %.