| 摘要 |
PROBLEM TO BE SOLVED: To provide a stable, prescribed, constant flow by providing a communicating passage communicating one end to a top end side of an inflow chamber provided in a body and other end to an outflow chamber. SOLUTION: When constant flow liquid Wc is flown, a different pressure is generated between an inflow side and an outflow side of a flow regulating throttle valve 11. The balance between the differential pressure and a spring 31 for the diaphragm decides the position of a diaphragm so as to decide the aperture of a pilot valve 9. If there is increase/decrease in the flow rate of liquid We, the differential pressure of the flow rate regulating throttle valve 11 is changed, the position of the diaphragm is changed, the aperture of the pilot valve 9 is changed, and the flow rate of the liquid Wc is held constant. A communication passage 22 has one end communicated with the top end side of the inflow chamber 4 so that the gas holdup in the inflow chamber 4 is prevented and the generation of oscillation caused by the presence of bubbles is eliminated.
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