发明名称 DRESSING DEVICE AND POLISHING DEVICE PROVIDED WITH THIS DRESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a dressing device capable of enhancing flatness of a polished surface of a turn table by giving a dressing to the surface while controlling the attitude of a dresser main body by electromagnetic force and provide a polishing device provided with the dressing device. SOLUTION: This dressing device 5, giving a dressing to a polished surface on a turn table 1 coming into slide contact with a polishing object, are provided with a dresser main unit 9 making contact with the polished surface to give a dressing to the surface, a press means 22 pressing the dresser main unit 9 to the polished surface of the turn table 1, and an attitude control means 11 controlling the attitude of the dresser main unit 9 by electromagnetic force.
申请公布号 JP2000263416(A) 申请公布日期 2000.09.26
申请号 JP19990065710 申请日期 1999.03.11
申请人 EBARA CORP 发明人 SATO KAZUKI;KIMURA NORIO
分类号 B24B21/00;B24B21/18;B24B31/00;B24B53/017;H01L21/304 主分类号 B24B21/00
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