| 摘要 |
PROBLEM TO BE SOLVED: To improve energy conversion efficiency and to reduce weight by injecting current to a planar optical device with a small opening formed on a substrate via electrical wiring formed on the same substrate. SOLUTION: In a face light-emitting laser 4, a one-wavelength resonator 12 is pinched by distribution reflection mirrors 11 (n type) and 13 (p type) and is subjected to epitaxial growth on a laser substrate 10. A light-emitting region 18 that is subjected to current constriction is etched in a ring shape and is flattened by polyimide 15. Also, a p electrode 16 with a light take-out window is formed by an insulation film 14, and an n electrode 17 is formed at the side of the substrate 10. The face light-emitting laser 4 is mounted to the tip of a cantilever 8 that is composed of a thin-film elastic body 2 being formed on an Si substrate 1, and a projecting member 3 with a small aperture 30 is mounted to the tip of a light-emitting surface. Also, electrode patterns 5 and 6 wired onto the cantilever 8 are conductively joined to the p electrode 16 and the n electrode 17, respectively, and current is injected to the face light- emitting laser 4 via the electrode patterns 5 and 6. |
