PLASMA PROCESSING APPARATUS AND METHOD OF MAINTAINING THE SAME

摘要

A plasma processing apparatus and a plasma processing method wherein part replacement and maintenance work can be easily carried out in a processing chamber. The plasma processing device has a vacuum container with a processing chamber (100) therein, plasma generating devices (110 and 101) for generating a plasma in the chamber, and electrodes for holding samples to be processed in the chamber. In this apparatus, the upper wall of the chamber is an openable/closable part, and at least one (110) of the component constituting the plasma generating device including a nonmetal brittle member is arranged on the openable/closable part. The openable/closable part can be stably held with the inner side thereof up by rotating at least one part of the upper wall constituting the top of the chamber around a generally horizontal shaft. The inner side of the openable/closable part is held at an angle less than 30 degrees from the horizontal plane with the component held while the openable/closable part is opened.