| 摘要 |
PROBLEM TO BE SOLVED: To provide an air permeable porous ceramic sintered compact substrate for floating objects which is suitable for transportation and transfer of objects, such as semiconductor wafers, liquid crystals and glass substrates, and is free of failure, dust and dirt, and is used for a contactless floating transportation device and its production. SOLUTION: The above substrate consists of the air permeable porous ceramic sintered compact substrate 1 for object floating which consists of the air permeable porous ceramic sintered compact substrate and is formed with glassy film layers 4 for hermetic sealing formed of glassy members in flank parts. The contactless and safe floating transportation and transfer of the objects, such as the semiconductor wafers, liquid crystals and glass substrates, by applying a gas source are made possible. |
