| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce instability in formation or activation processes by setting the softening point of the base body of a substrate, having a number of electron emitting elements arranged thereon and having a pair of element electrodes and a conductive thin film having an electron emission part to a specified temperature or higher. SOLUTION: A base body 1 of this electron source substrate has a softening point of 750 deg.C or higher, and borosilicate glass, soda lime glass, zinc borosilicate glass, or alumino borosilicate glass is used therefor, so that softening of a substrate near an electron emission part 5 and the deformation of the electron emission part are thereby suppressed. A surface conductive type electron emitting element is desirably used as the electron emitting element. A deposit composed mainly of carbon or a carbon compound and a thin film mainly composed of Pd or PdO are desirably used as an electron emission part 5 and a conductive thin film 4, respectively. A plurality of electron emitting elements is arranged in parallel on the substrate, and element electrodes are connected to mutually insulated X-direction and Y-direction metal wirings.</p> |
