| 摘要 |
PROBLEM TO BE SOLVED: To limit a real-time tracking deflection to a very small volume, to make drawings only in a range where no glitch noise occur, and to make drawings accurately without being affected by glitch noises. SOLUTION: This electron beam drawing method is carried out, in a manner where a difference between shot coordinates and a pattern is corrected on defection distortion by a following deflection arithmetic part 6, then a following deflection volume at the position of a specimen pad is divided into a following deflection volume (synchronous following deflection volume) which is sampled with a timing of figure drawing (shot) and a real-time following deflected amount where a synchronous following deflected amount serves as an origin, and the synchronous following deflected volume is outputted through a register 13, a digital arithmetic unit 21, and a D/A converter 15 synchronizing with shot timing. The real-time following deflection volume is outputted in real time through a digital arithmetic device 14 and a D/A converter 16. A deflector is driven by drawing deflection data outputted from a pattern generator 1, together with the above both following deflected amounts added to the deflection data by an analog adding machine.
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