| 摘要 |
PROBLEM TO BE SOLVED: To provide a relatively inexpensive high-sensitivity high-accuracy angular velocity sensor. SOLUTION: An angular velocity sensor is constituted in such a way that a bimorph is constituted by sticking piezoelectric elements 11 and 12 to each other and an equilateral triangle pole having a bottom face perpendicular to the stuck joint surface A of the elements 11 and 12 is formed by segmenting the bimorph. Then the triangle pole is fixed on a base 15 integrated with or separated from a piezoelectric element and independent electrical electrodes Ad, Bd, C1d, and C2d are respectively formed on the joint surface A and the surfaces B, C1, and C2 of the triangle pole. In addition, the electrodes Bd, C1d, and C2d of the triangle pole and the electrode Ad on the joint surface A are polarized and the triangle pole is set to an excited state by driving the pole in the direction of the joint surface A by impressing an AC voltage upon each electrode. Then the output of the sensor caused by a Coriolis force is fetched by fetching the output difference of the electromotive force of the bimorph at the electrodes C1 and C2d in the direction perpendicular to the exciting direction. |
