| 摘要 |
PROBLEM TO BE SOLVED: To perform a high-accuracy analysis by preventing a contamination inside an analytical chamber. SOLUTION: In a main chamber 20, a sample opening 21 is formed in the opposite position of a window plate 23 for laser transmission, and a sample 5 is pressed by a pressure body 31 so at to be brought into close contact in such a way that a sample face is exposed in the opening 21. In addition, an auxiliary chamber 27 is brought into close contact with the main chamber 20 so as to surround the sample 5. The inside of the main chamber 20 and the inside of the auxiliary chamber 27 are kept independently airtight by keeping a gap from the sample 5. Since only a part of the sample 5 is exposed inside the main chamber 20, a contamination due to an undesired component which sticks to the sample 5 can be suppressed to a minimum.
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