Solid state magnetic field sensor method

摘要

A method for making a magnetoresistive sensing device including depositing an ultrathin active film responsive to changes in magnetic field energy onto a compliant layer of periodic table group III-V semiconductor material on a semiconductor substrate wafer, the compliant layer being capable of retaining strain energy resulting from the layering semiconductor materials with different lattice constants. This method produces a battery operable ultrathin device highly sensitive to changes in magnetic field flux.