PLASMA-RESISTANT MEMBER AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To produce a plasma-resistant member comprising a boron carbide- based sintered compact excellent in plasma resistance in a halogen gas atmosphere and to provide a method for producing the plasma-resistant member. SOLUTION: This plasma-resistant member is composed by forming a mixture prepared by adding one or more kinds of oxides comprising groups 4a and 5a elements of the periodic table as a sintering aid in an amount within the range of 1-20 wt.% based on a boron carbide powder having <=5 μm average particle diameter thereto into a prescribed shape and then baking the formed compact at 1,800-2,100 temperature in an inert gas atmosphere. The resultant plasma-resistant member comprises a boron carbide-based sintered compact having >=98% relative density.