发明名称 SEMICONDUCTOR AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a structure of semiconductor device, in which self conductance and transconductance of wire are reduced and a manufacturing method thereof. SOLUTION: Au wires 4a, 4b are connected with an electrode pad 3 on a semiconductor element 2 formed on a substrate 1. The wires 4a, 4b are connected, at the other end thereof, with a wiring part of same potential formed on the substrate 1. A conductive film 5 of Au is formed between the wires 4a, 4b. An insulation film 6 made of polyimide is formed on the semiconductor element 2, while abutting on the electrode pad 3 and an insulation film of SiO2 is formed on the substrate 1.
申请公布号 JP2000243778(A) 申请公布日期 2000.09.08
申请号 JP19990042499 申请日期 1999.02.22
申请人 TOSHIBA CORP 发明人 NAKAGAWA TOSHIE;KURIHARA NORIHIRO
分类号 H01L21/60 主分类号 H01L21/60
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