发明名称 IC-TESTING APPARATUS AND TEST METHOD USING THE APPARATUS
摘要 PROBLEM TO BE SOLVED: To switch a d.c. test and a functional test with use of a semiconductor switch and, effectuate a d.c. overload test without affecting a test pattern waveform in the functional test. SOLUTION: A sense line SEN for measuring a voltage and a force line FOR for supplying a current are connected respectively through a first switch S1 and a second switch S2 to a terminal P of an IC 10 to be tested, and a functional test device 40 is connected through a third switch S3 to the terminal P of the IC to be tested. In the thus-constituted IC-testing apparatus, the first through third switches S1-S3 are constituted of semiconductor switches, and moreover a fourth switch S4 constituted of a semiconductor switch having a small on resistance is connected between terminals at the opposite side to the terminals of the first switch S1 and second switch S2 connected to the terminal P of the IC to be tested. The fourth switch S4 is controlled to be turned on at the time of an overload test in a d.c. test to carry out the test.
申请公布号 JP2000241503(A) 申请公布日期 2000.09.08
申请号 JP19990360498 申请日期 1999.12.20
申请人 ADVANTEST CORP 发明人 HASHIMOTO YOSHIHIRO
分类号 G01R31/28;(IPC1-7):G01R31/28 主分类号 G01R31/28
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