SURFACE TREATMENT APPARATUS USING GAS JET,申请号EP19960928669-传众专利搜索

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发明名称	SURFACE TREATMENT APPARATUS USING GAS JET
摘要
申请公布号	EP0851040(A4)	申请公布日期	2000.09.06
申请号	EP19960928669	申请日期	1996.08.28
申请人	KOMATSU LTD.	发明人	SAKURAGI, SHUNICHI
分类号	C30B25/02;C23C16/27;C23C16/50;C23C16/513;C30B25/10;C30B29/04;H01L21/205;(IPC1-7):C23C16/50;B01J19/08;C23C14/24	主分类号	C30B25/02
代理机构		代理人
主权项
地址

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