| 摘要 |
<p>A planar optical scanner which is smaller and cheaper, and its mounting structure. A silicon wafer (11) is provided with a mirror (14) on the top surface side of a movable plate (12) pivotably supported by torsion bars (13A, 13B), a drive coil (15) on the rear surface side of the movable plate (12) to enable reduction of the area of the movable plate (12). A package substrate (31) is provided with a space (32) for allowing oscillation of the movable plate (12) and conductive patterns (33, 33A and 33B) in a region where an optical scanner is fixed, and the optical scanner (10) is mounted on the package substrate (31) with drive coil electrode terminals (16A, 16B) provided on the rear surface of the silicon wafer (11) in contact with the conductive patterns (33, 33A and 33B).</p> |
