| 摘要 |
PROBLEM TO BE SOLVED: To provide a coater which is low in production costs, can appropriately adjust the pressure of a coating liquid tank, and discharges a coating liquid stably. SOLUTION: In a coater in which a chip 3 holding a spherical substrate 4 freely rotatably is connected to a tank 1 filled with a coating liquid, a cylinder member 5 having a vent hole 52 in the diameter direction in a small diameter part 51 is arranged at the tail end of the tank 1, a tube 6 which closes the vent hole is embedded in the outside surface of the small diameter part, and a piston member 7 having a through hole 71 is arranged in the cylinder member. When the piston member is advanced with the through hole closed by a finger head, compressed air in the cylinder member expands the tube and enters the tank 1 from the through hole to pressurize the tank 1. |
