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发明名称
Method of manufacturing semiconductor device
摘要
申请公布号
US6110647(A)
申请公布日期
2000.08.29
申请号
US19980024225
申请日期
1998.02.17
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
INOUE, SOICHI;KANEKO, HISASHI;HASUNUMA, MASAHIKO;USUI, TAKAMASA;AOKI, MASAMI;YAMAMOTO, KAZUKO;KOBAYASHI, SACHIKO
分类号
G03F9/00;G03F1/08;G03F1/14;G03F1/36;G03F1/68;G03F7/00;G03F7/20;H01L21/027;H01L21/768;H01L21/82;H01L21/822;H01L27/04;(IPC1-7):G03F7/00
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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