发明名称 |
DEVICE FOR PRODUCING SINGLE CRYSTAL |
摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal production device which enables the pulling-up of a single crystal without causing any inclination of a holding clamp or any break of a seed crystal even when an error in take-up of a holding wire is caused. SOLUTION: This device is provided with: pulley springs 20a and 20b each of which is used as an elastic member for supporting the corresponding one of holding wires 2a and 2b used for suspending a holding clamp 13, in the pulling-up direction; and a controller 19 for controlling the take-up rate of a main wire 1 by using a manipulated variable(s) of the growth rate of a single crystal 11 and also, controlling the take-up rate of each of the holding wires 2a and 2b by using the growth rate of the single crystal 1 and another manipulated variable(s) of the growth rate, which variable(s) is used for adjusting the tension of each of the holding wires 2a and 2b to a preset load sharing tension value of the single crystal 11.
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申请公布号 |
JP2000233992(A) |
申请公布日期 |
2000.08.29 |
申请号 |
JP19990037241 |
申请日期 |
1999.02.16 |
申请人 |
KOMATSU ELECTRONIC METALS CO LTD |
发明人 |
ONOE SHUJI;SADAMATSU TAKESHI;KUMAGAI HIDEO;KUROSAKA SHOEI |
分类号 |
C30B15/30;C30B29/06;(IPC1-7):C30B15/30 |
主分类号 |
C30B15/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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