| 摘要 |
<p>PROBLEM TO BE SOLVED: To measure a temperature with good reproducibility and prevent dispersion in processing of a semiconductor substrate such as deposition by forming a heat generating electrode and a temperature measuring probe inside a plate body whereon a semiconductor substrate is mounted. SOLUTION: An electrostatic chuck electrode 3 for electrically fixing a semiconductor substrate by using electrostatic attraction and a heating heater line 4 as a heat generating electrode which is positioned below the electrode 3 are buried in an alumina substrate 2 as a plate body whereon a semiconductor substrate 1 is mounted. Two temperature measuring probes 5a, 5b formed of the same material as the heating heater line 4 are formed in the alumina substrate 2. Since first to sixth W films constituting the temperature measuring probes 5a, 5b are formed by screen print similar to the electrostatic chuck electrode 3 and the heating heater line 4, they can be formed with good reproducibility. Therefore, a temperature of a hot plate can be measured with good reproducibility.</p> |
