发明名称 CARBON-ENHANCED FLUORIDE ION CLEANING
摘要 <p>A method and system for cleaning a metal article. The system is used to employ a method that comprises placing the article in a means defining a chamber; subjecting the article to a gaseous atmosphere in the means defining a chamber, where the gaseous atmosphere consists essentially of carbon, hydrogen, and fluorine; and subjecting the article to the gaseous atmosphere at a temperature in a range from about 815°C to about 1100°C to clean the article.</p>
申请公布号 WO2000048751(A1) 申请公布日期 2000.08.24
申请号 US2000003873 申请日期 2000.02.15
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