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发明名称
PIEZOELECTRIC RESONATOR USING SACRIFICIAL LAYER FOR TUNING
摘要
申请公布号
EP1029372(A1)
申请公布日期
2000.08.23
申请号
EP19980934179
申请日期
1998.06.26
申请人
CTS CORPORATION
发明人
ZIMNICKI, CHARLES;CARUBA, JAMES, F.;CHAUDHARI, PIYUSH;LING, THEODORE
分类号
H01L41/09;H01L41/22;H03H3/04;H03H9/19;(IPC1-7):H01L41/08
主分类号
H01L41/09
代理机构
代理人
主权项
地址
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