| 摘要 |
PROBLEM TO BE SOLVED: To enable highly precise shape measurements on objects to be measured of various surface shapes by changing the intensity of laser light to acquire each image and obtaining shape lines from their synthetic image. SOLUTION: A switch SW1 is turned to a weak side to reduce the light intensity (light quantity) of laser 2, and the surface of an object to be measured is irradiated with it to pick up the image of reflected light by a camera 5 to obtain an image X1 in a region in large reflected light. The image X1 is absent as an image in a region in little reflection and becomes intermittent lines. The intermittent lines are detected by a region determining part 31, and a switch SW2 is changed. In other words, the switch SW1 is changed to a strong side to obtain an image X2 of a multi-valued image even in a region in little reflected light by the reflected light of the light of the intensified laser 2. The region determining part 31 determines regions in which an image is present or absent from the image X1, and an image synthesizing part 12 interpolates and synthesizes the image X2 into the image X1 according to the results of the determination. A shape line extracted from the synthesized image by a line thinning device 8 is measured as the shape of the surface of the object to be measured by a shape measuring part 9.
|
