| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a bonding heater having long lifetime capable of reducing uneven temperature distribution on the heating surface when the heater is cooled while preventing the heater from deformation, damage or oxidation. SOLUTION: A bonding heater 1 includes a ceramic basic material 2 having a heater part 14 buried with a heating element 12, and a holder part 15 for coupling the heater part 14 with other member. The ceramic basic material 2 is integrated with the heating element 12 by sintering them integrally and a CVD layer 19 of SiC excellent in thermal conduction is formed on the heating surface 17 of the heater 1.</p> |
