PLACING AND POSITIONING MECHANISM FOR SEMICONDUCTOR WAFER CONTAINER

摘要

PROBLEM TO BE SOLVED: To provide a placing and positioning mechanism which can improve the placing and positioning accuracy of a semiconductor wafer container over a long period. SOLUTION: A placing and positioning mechanism is provided with grooves 2 for positioning a semiconductor wafer container 1 is on the bottom face of a semiconductor wafer container 1, rotary bodies 3A which come into contact with the internal surfaces of the grooves 2, and supports 3B which rotatably support the rotary bodies 3A. The rotary bodies 3A quickly rotated upon coming into contact with the internal surfaces of the grooves 2 and can guide the container 1 to an accurate alignment position.