| 摘要 |
<p>A system to diagnose potential malfunctions in semiconductor manufacturing equipment components (10, 20), this system includes a transducer (24) to monitor component vibration signatures of the semiconductor manufacturing equipment components. This transducer provides an output signal representative of the component vibration signature (27) to an electrical circuit (28). The electrical circuit contains a transmitter (30) which transmits via a carrier signal (32), a data signal representative of the output signal of the transducer. A computer system (36) receives and stores the data signal (29). The computer system contains a software application to analyze the data signal and alert a user to differences between the data signal and historical signal.</p> |
