| 摘要 |
A semiconductor pressure sensor includes a substrate with a semiconductor pressure detecting element mounted thereon. The pressure detecting element includes a pressure detector, having two terminals, which generates a small potential difference between the two terminals in proportion to a pressure applied to the pressure sensor, and a peripheral circuit for differential amplification of the small potential difference based on a reference voltage applied thereto. Reference voltage setting resistors are used to set the reference voltage to a predetermined value. Also, temperature compensating resistors compensate for an error produced in the pressure detector as a result of change in temperature and an error caused in the peripheral by a change of the reference voltage resulting from the change in temperature, respectively.
|
