发明名称 |
Spectrometer and method of spectroscopy |
摘要 |
A spectrometer and method of spectroscopy are provided for surface analysis. The spectrometer comprises an energy analyser for analysing the energies of charged particles liberated from a sample, a lens arranged to project a diffraction image of the analysis area at the image plane of the lens and a detector for detecting the charged particles. The analyser and lens are arranged to generate an image at the detector in which the charged particles are distributed along a first direction according to their emission angles and are distributed along another direction according to their energies. The detector is arranged to detect the distribution of charged particles in the image along the first direction to provide angle resolved energy spectra.
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申请公布号 |
US6104029(A) |
申请公布日期 |
2000.08.15 |
申请号 |
US19980139198 |
申请日期 |
1998.08.25 |
申请人 |
VG SYSTEMS LTD. |
发明人 |
COXON, PETER;BARNARD, BRYAN;VON HARRACH, H. SEBASTIAN |
分类号 |
H01J49/40;(IPC1-7):H01J47/00 |
主分类号 |
H01J49/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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