| 摘要 |
PROBLEM TO BE SOLVED: To improve adhesion property of a DLC film with a magnetic material when the DLC film is formed by adding group IV elements to a carbon film or a film essentially comprising carbon formed on a magnetic thin film. SOLUTION: This magnetic recording medium has a magnetic layer formed on a substrate and has a carbon film having SP3 bond on the magnetic layer. The carbon film contains B, Al, Ga, N, P or As. The carbon film contains 10 to 60 at.% hydrogen and contains B, Al, Ga, N, P or As. These group III or group V elements has an effect to relax the inner stress of the DLC film. Although the adhesion property greatly depends on the adhesion strength of the DLC and the magnetic material on the interface, the adhesion property can be improved by decreasing the inner stress of the DLC itself. |
