发明名称 |
Thin film transistor and method for fabricating the same |
摘要 |
A thin film transistor includes an insulating substrate; a polysilicon pattern formed on the insulating substrate; a first nitride layer disposed on a channel portion of the polysilicon pattern; heavily doped semiconductor layer regions disposed in upper portions of the polysilicon pattern on sides of the first nitride layer pattern; an interlevel insulating layer disposed on the insulating substrate, the polysilicon pattern, the first nitride layer and the heavily doped semiconductor layer regions, the interlevel insulating layer having a contact hole to expose a portion of the heavily doped semiconductor layer; source and drain electrodes connected to the heavily doped semiconductor layer regions through the contact hole; and a gate electrode formed on the interlevel insulating layer disposed on the first nitride layer.
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申请公布号 |
US6100119(A) |
申请公布日期 |
2000.08.08 |
申请号 |
US19980057538 |
申请日期 |
1998.04.09 |
申请人 |
LG ELECTRONICS INC. |
发明人 |
JANG, JIN;LEE, KYUNG-HA;CHUNG, YOU-CHAN |
分类号 |
H01L29/49;(IPC1-7):H01L21/336;H01L21/84 |
主分类号 |
H01L29/49 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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