| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the need for the control of the distance between a sample and a probe according to the thickness of the sample by providing an elastic body for pressing the sample from the side of a base against sample pressing plates provided on columns. SOLUTION: Sample pressing plates 51 and 52 are arranged at a predetermined distance (d) from a base 10 by a spacer 54, a conductive terminal 21, and a spacer 24. In other words, the spacer 24, conductive terminal 21, and spacer 54 each function as columns arranged on the base 10. Then a sample 40 placed on a plate-shaped heater 30 formed of a heating part 31 and an insulating part 32 is in contact with the surfaces of the sample pressing plates 51 and 52 on the side of the base 10. The sample 40 and the heater 30 are pressed from the surface of the base 10 toward the sample pressing plates 51 and 52 by an elastic body 70 mounted to the distance conductive terminals 21 and 22 by screws 73. As a result, the sample 40 is pressed against the sample pressing plates 51 and 52 to maintain the distance (d) between the surfaces of the base 10 and the sample 40 constant regardless of the thickness of the sample 40 and to maintain the interval (t) between the sample 40 and a probe 60 as well.
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