| 摘要 |
PROBLEM TO BE SOLVED: To easily remove an extra fine foreign matter b using a metal wire bundle including metal fine wires having a diameter of a specified value or finer for a metal brush while the roots of metal wires are fixed in the base board of a support. SOLUTION: The roots of plural metal wires 1 are fixed in a base board 4 to be made to a metal wire bundle 2, the base board 4 is buried in a support body 3. Part of the metal wires 1 constituting the metal wire bundle 2 is metal fine wires having a diameter of <=50μm. When the metal bundle 2 is constituted with the metal wires of a diameter of <=50μm and the metal wires of a diameter of >50μm, a ratio of the small wires is desirably >=50% of total in term of the area at the cross section of the metal wire bundle 2. The base board 4 is made of the matrix which covers the surrounding the metal wire bundle 2 and also buries between each metal wire. The metal wire bundle is desirably constituted of metal wires 1 having diameters of 2-10μm and 20-50μm.
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