发明名称 SEED CHUCK PIN
摘要 PROBLEM TO BE SOLVED: To stably fix a seed crystal to a seed chuck by increasing the contact area of a seed chuck pin to the notch plane of the seed crystal. SOLUTION: A seed chuck 21 has a seed crystal insertion hole 21a formed along the central axis of a chuck main body 21d at the bottom of the chuck main body 21d and a pine hole 21b which is perpendicularly intersected to the insertion hole 21a. and is eccentrically formed from the center of the axis of the insertion hole 21a. A seed chuck pin is inserted into the pin hole 21b of the seed chuck 21. A pin barrel part 24a is brought into contact with a notch plane 22a formed at the side of a seed crystal 22 inserted into the insertion hole 21 and the seed crystal 22 is fixed to the seed chuck 21. A plane part 24b to be brought into contact with the notch plane 22 in plane is formed on the pin barrel part 24a.
申请公布号 JP2000211992(A) 申请公布日期 2000.08.02
申请号 JP19990013362 申请日期 1999.01.21
申请人 MITSUBISHI MATERIALS SILICON CORP 发明人 TAMURA YOSHINORI;HOSODA KOJI;NAKAGAWA TOYOJI
分类号 C30B15/32;(IPC1-7):C30B15/32 主分类号 C30B15/32
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