发明名称 |
SEED CHUCK PIN |
摘要 |
PROBLEM TO BE SOLVED: To stably fix a seed crystal to a seed chuck by increasing the contact area of a seed chuck pin to the notch plane of the seed crystal. SOLUTION: A seed chuck 21 has a seed crystal insertion hole 21a formed along the central axis of a chuck main body 21d at the bottom of the chuck main body 21d and a pine hole 21b which is perpendicularly intersected to the insertion hole 21a. and is eccentrically formed from the center of the axis of the insertion hole 21a. A seed chuck pin is inserted into the pin hole 21b of the seed chuck 21. A pin barrel part 24a is brought into contact with a notch plane 22a formed at the side of a seed crystal 22 inserted into the insertion hole 21 and the seed crystal 22 is fixed to the seed chuck 21. A plane part 24b to be brought into contact with the notch plane 22 in plane is formed on the pin barrel part 24a.
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申请公布号 |
JP2000211992(A) |
申请公布日期 |
2000.08.02 |
申请号 |
JP19990013362 |
申请日期 |
1999.01.21 |
申请人 |
MITSUBISHI MATERIALS SILICON CORP |
发明人 |
TAMURA YOSHINORI;HOSODA KOJI;NAKAGAWA TOYOJI |
分类号 |
C30B15/32;(IPC1-7):C30B15/32 |
主分类号 |
C30B15/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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