| 摘要 |
PURPOSE:To output the position of a flaw as absolute coordinates by providing a flaw position detecting means detecting the position of the flaw present on a sample to be inspected and an absolute coordinates position detecting means detecting the absolute position on the sample to be inspected. CONSTITUTION:For example, a sample S is placed on the sample loading mechanism 9 in a position detecting part A and the shift quantity thereof from a reference position is corrected by processing and operating the output signal of a position detecting means 10 by a position shift quantity calculating circuit 11 to move the loading mechanism 9 by an aligning means 12. Next, the sample S is transferred to the loading mechanism 1 of a foreign matter detecting part B by a feed mechanism 13. The sample S is illuminated by an illuminator 12 and the flaw on the sample S is detected by an optical means 3 and a scanning position scanning the detection visual field to the sample S by a scanner 4 is detected by a detection means 5 and respective detection output signals are successively processed by a signal processing circuit 6. A memory circuit 7 inputs the coordinates position from the detection means 5 as the position of the flaw processed by the circuit 6 to store the same. The absolute coordinates position of the stored individual flaw is stored in an external memory medium 8 and observation/analysis is performed using said coordinates position. |
