摘要 |
PROBLEM TO BE SOLVED: To improve light transmission efficiency and contactability with a sample at an aperture having a minute diameter, and to manufacture such a structure easily. SOLUTION: A transmission window 2 formed on a shielding film 1 is formed in a projecting structure filled with transparent dielectric material. The structure can be manufactured by giving a chemical change selectively to a part of the shielding film 1 to be transparent. The transparency can be realized by selective oxidation, hydroxylation, nitration or fluorination, or current-sending oxidation (anode oxidation) executed by using a minute search needle or the like, thermal oxidation by spot heating or the like. Hereby, the distance between a sample face and the transparent window 2 can be shortened by the more projecting structure than the shielding film 1 surface, and near field light can be supplied efficiently up to the object surface. |