| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope which can prevent a snap-in operation or the like due to an electrostatic force and which reduces the snap-in operation due to the surface of a sample, by a method wherein the time required for a Z-course movement is installed, the electrostatic charge on the face of the sample is kept constant. SOLUTION: A cantilever part is constituted so as to be provided with a plurality of cantilevers for measurement and for conductive Z-distance control. At this time, the cantilever C1 for Z-distance control has a structure which is not damaged even when it comes into contact with the face of a sample at high speed, because it is soft at a spring constant of 0.01 to 0.1 N/m and its tip radius is round at 100 to 200 nm. In addition, the control operation of a Z-coarse movement is changed over by the bending signal of the cantilever C1 for Z-distance control, and the cantilever C2 for measurement is constituted in such a it is sent slowly to a part near the face of the sample. |
