发明名称 LIGHT SYSTEM FOR PHOTO STEPPER
摘要 PURPOSE: A light system for a photo stepper is provided to block the excessive light than required as well as to minimize the size of the light system by using a plate shape for a shutter. CONSTITUTION: A light system for a photo stepper includes a fixed block(100), a support block(110), a step motor(120), and a shutter(130). The fixed block(100) is fixed on the body of the lamp system. The support block(110) is attached at a predetermined position of one side of the fixed block, and includes one photo sensor(150) at the side adjacent to the fixed block. The step motor(120) is fixed on the lower terminal of the support block, and includes a support pole on the center of the front surface. The shutter(130) is assembled to the support pole so as to contain the terminal in the depression hole of the photo sensor. The shutter further includes a plurality of circular penetrating holes(h1,h2,h3,h4,h5) along with the edge of the shutter.
申请公布号 KR20000046450(A) 申请公布日期 2000.07.25
申请号 KR19980063135 申请日期 1998.12.31
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, JI TAE;KIM, JONG SU
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
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