发明名称 AMPULE WITH INTEGRAL FILTER
摘要 <p>A storage device containing a quantity of a liquid chemical substance which is used as a reactant in a chemical process, the device being composed of: a closed container holding the quantity of substance and having a wall provided with an inlet opening and an outlet opening; an inlet valve coupled to said inlet opening, the inlet valve being closeable to block said inlet opening; an outlet valve coupled to the outlet opening, the outlet valve being closeable to block the outlet opening; and a filter interposed between the quantity of liquid and said outlet valve.</p>
申请公布号 EP1019180(A1) 申请公布日期 2000.07.19
申请号 EP19980949326 申请日期 1998.09.08
申请人 APPLIED MATERIALS, INC. 发明人 SCHMIDTT, JOHN, V.
分类号 F17C13/00;B01D35/027;C07B61/00;C23C16/448;F17D3/16;H01L21/205;(IPC1-7):B01F1/00 主分类号 F17C13/00
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