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发明名称
INTERFEROMETRIC METHOD AND APPARATUS
摘要
申请公布号
EP1019703(A1)
申请公布日期
2000.07.19
申请号
EP19980948466
申请日期
1998.09.23
申请人
ZYGO CORPORATION
发明人
HILL, HENRY, ALLEN
分类号
G01B9/02;G01N21/45;(IPC1-7):G01N21/45
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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