PIEZOELECTRIC ACTUATOR, METHOD FOR DRIVING THE SAME, AND COMPUTER-READABLE RECORDING MEDIUM STORING PROGRAM FOR PROCESSING THEREBY

摘要

PROBLEM TO BE SOLVED: To increase the torque and moving amount of the moving body of a piezoelectric actuator. SOLUTION: A micro piezoelectric motor 100 is provided with a mechanism section composed of a rotary moving body 1, a vibrating body block 2, and a base chassis 3 and the vibrating block 2 has three bending and displacing mechanism sections 22 each having such a structure that a piezoelectric element 21 is expanded on and stuck to a substrate 24. The mechanism section 22 applies a voltage having the frequency at which the mechanism section 22 resonates in a tertiary mode across the piezoelectric element 1 from a power source 4. The frequency is controlled by means of a controller 5.