| 摘要 |
PROBLEM TO BE SOLVED: To obtain a contact site detecting structure for using an ultrasonic touch signal probe for copying measurement and continuous measurement. SOLUTION: A contact site detecting structure 1 of a touch signal probe 10 is provided with a circular motion generating means 30 for generating the scanning motion of a stylus 102 within a plane A, a phase value detecting means 50 for detecting a phase valueθindicating the position of rotation of the scanning circular motion, and a contact site detecting means 70 for detecting the contact site of a contact part 102A from a detected signal value V detected by a detecting means 103A and the phase valueθ. The contact site of the contact part 102A can be detected by the contact site detecting means 70, so that the touch signal probe 10 can be used for the copying measurement and continuous measurement of an object to be measured.
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