| 摘要 |
PROBLEM TO BE SOLVED: To attain with high accuracy the calibration of an image processor and a moving table, when an error at the time of calculating the position of the center of rotation is made large due to the impossibility of the increase of the angle of rotation of aθaxis of the moving table. SOLUTION: The specific pattern of a calibration mark or work 10 at a first point is recognized from the photographed image of the calibration mark or work 10 placed on an XYθtable 14, and the position (x1, y1) is measured, and theθtable is rotated so that the calibration mark or work 10 can be deviated from the range of the field of sight of a camera 11. Then, the X or Y table is moved within the field of view of the camera, and the specific pattern of the calibration mark or work 10 at the second point is recognized, and the position (x2, y2) is measured, and the position of the center of rotation of theθtable is calculated, based on position information (tx1, ty1, tθ1) of the XYθtable at the first point and position information (tx2, ty2, tθ2) of the XYθtable at the second point.
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