| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzle-channel plate and its manufacture wherein an adhesion failure due to voids and flashes of an adhesion layer is eliminated, an alignment in processing nozzles can be determined only with a positioning accuracy at the time of laser processing, a decrease in yield of an adhesion process itself and because of the adhesion process is prevented, and costs can be reduced by layering a polymer film and a metallic film without the adhesion layer. SOLUTION: A nozzle plate for discharging ink drops and a liquid chamber layer below the nozzle plate are formed of a directly layered film of a polymer film 1 and a metallic layer 2. A nozzle plate 1 and a liquid chamber substrate 8 below the nozzle plate are formed of a layered substrate without an adhesion layer. After the liquid chamber part 8 is formed by etching the metallic layer 2, the polymer film 1 is bored by a laser from an etching face (from the side of the liquid chamber 8), whereby nozzles 4 are formed. A nozzle-channel plate 10 formed in this method is joined to a liquid chamber substrate 5, whereby an ink jet head is formed.
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