| 摘要 |
<p>PROBLEM TO BE SOLVED: To realize down-sizing and improve the efficiency of a doping chamber. SOLUTION: This device is provided with a doping chamber 1 to form a p layer as well as an n layer, an i chamber 3 to form an i layer, and a transfer chamber 4 provided with transfer arms 12 and 13 for shipping in/out a substrate 2 to/from the chambers 1 and 3. While the i layer is formed on the substrate 2 in the i chamber 3, the p layer is formed on another substrate 2 in the doping chamber 1 and further the n layer is formed on the other substrate 2 therein.</p> |
