VERIFYING DEVICE FOR HIERARCHICAL LAYOUT PATTERN

摘要

PROBLEM TO BE SOLVED: To verify the hierarchical layout pattern data with a hierarchical structure kept as it is by verifying the verifying cell data for every cell to acquire the hierarchical error data based on a verifying rule that is associated with every cell by a cell-based verifying rule reading module. SOLUTION: A cell-based verifying rule reading module 7 outputs a verifying rule 8 to every verifying object cell that is designated by verifying decision module 3 against the verifying cell data 6. The module 9 verifies the data 6 based on the rule 8 and acquires the hierarchical error data 10. A hierarchical error data processing module 11 acquires the final error data via the data 10. Thus, a hierarchical layout pattern is verified with a hierarchical structure kept as it is. Thereby the error checking time is shortened.