DEVICE WITH ACOUSTIC WAVES GUIDED IN A FINE PIEZOELECTRIC MATERIAL FILM BONDED WITH A MOLECULAR BONDING ON A BEARING SUBSTRATE AND METHOD FOR MAKING SAME

摘要

The invention concerns a surface acoustic wave device comprising a fine piezoelectric material film, a molecular glue layer and a bearing substrate. The fine film constitutes a sound energy guide enabling to increase the performance levels of the device. The invention also concerns methods for making said sound wave device, comprising in particular a step which consists in molecular bonding between a bearing substrate and a piezoelectric substrate, then a step reducing the thickness of the piezoelectric substrate.