| 摘要 |
A method for making the alignment means of an optical apparatus. The apparatus comprising a substrate defining one or more aligned cavities, a primary optical path for accommodating the passage of a light beam, and an upper cavity in the substrate which is aligned to a predetermined degree of precision and in direct communication with the primary optical path. The beam steering means directs the beam. The hybrid inter-optical alignment precision occurring when a beam steering mechanism is micromachined with respect to a crystallographic orientation of the substrate is used for precise beam steering.
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