发明名称 |
Probe card with vertical needle for enabling improved wafer testing and method of manufacturing the same |
摘要 |
An improved probe card with a vertical needle is provided which ensures required needle pressure even when there is a significant variation of probe needles in a height direction. Upper and lower portions of probe needle are respectively supported by upper and lower guide plates. Upper portion of probe needle is bent in an L shape. A printed substrate is provided on upper guide plate.
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申请公布号 |
US6087840(A) |
申请公布日期 |
2000.07.11 |
申请号 |
US19980047934 |
申请日期 |
1998.03.26 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
MIZUTA, MASAHARU |
分类号 |
G01R1/073;G01R1/067;G01R31/28;H01L21/66;(IPC1-7):G01R31/02 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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