发明名称 Probe card with vertical needle for enabling improved wafer testing and method of manufacturing the same
摘要 An improved probe card with a vertical needle is provided which ensures required needle pressure even when there is a significant variation of probe needles in a height direction. Upper and lower portions of probe needle are respectively supported by upper and lower guide plates. Upper portion of probe needle is bent in an L shape. A printed substrate is provided on upper guide plate.
申请公布号 US6087840(A) 申请公布日期 2000.07.11
申请号 US19980047934 申请日期 1998.03.26
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 MIZUTA, MASAHARU
分类号 G01R1/073;G01R1/067;G01R31/28;H01L21/66;(IPC1-7):G01R31/02 主分类号 G01R1/073
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